Fracture toughness and critical thickness of β-(In<sub><i>x</i></sub>Ga<sub>1−<i>x</i></sub>)<sub>2</sub>O<sub>3</sub>/Ga<sub>2</sub>O<sub>3</sub> by first principles
Jiahe Cao, Zhigao Xie, Yan Wang, Hanzhao Song, Guosong Zeng, Weihua Tang, Chee‐Keong Tan
Abstract
The critical thickness of monoclinic (In x Ga 1− x ) 2 O 3 epitaxial film with In concentration up to 37.5% on β-Ga 2 O 3 substrate along [100], [010] and [001] orientations was explored.
Topics & Concepts
Monoclinic crystal systemMaterials scienceCrystallographyFracture toughnessEpitaxySubstrate (aquarium)Analytical Chemistry (journal)Composite materialCrystal structureChemistryGeologyOceanographyLayer (electronics)ChromatographyGa2O3 and related materialsZnO doping and propertiesElectronic and Structural Properties of Oxides