Effect of various pulse plasma techniques on TiO2 etching for metalens formation
Jong Woo Hong, Yeon Hee Kim, Hee‐Ju Kim, Hyun Woo Tak, Ki Deok Bae, Jeong Yub Lee, Hae Soo Bae, Yong Su Kim, Geun Young Yeom
Topics & Concepts
PlasmaEtching (microfabrication)Inductively coupled plasmaAnalytical Chemistry (journal)Materials sciencePulse (music)Plasma etchingChemistryOptoelectronicsOpticsNanotechnologyLayer (electronics)PhysicsChromatographyDetectorQuantum mechanicsZnO doping and propertiesPlasma Diagnostics and ApplicationsGas Sensing Nanomaterials and Sensors