Effect of molecular weight on the EUV-printability of main chain scission type polymers
Ashish Rathore, Ivan Pollentier, Harpreet Singh, Roberto Fallica, Danilo De Simone, Stefan De Gendt
Abstract
This study on the main chain scission type polymers, PMMA and a copolymer system, shows that the EUV-printability is proportional to the<italic>M</italic><sub>w</sub>of the starting material, which is attributed to the enhanced litho-parameters of higher<italic>M</italic><sub>w</sub>material.
Topics & Concepts
PolymerExtreme ultraviolet lithographyMaterials scienceCopolymerChain scissionBond cleavagePolymer chemistryChain (unit)Polymer scienceChemical engineeringComposite materialNanotechnologyOrganic chemistryChemistryPhysicsCatalysisAstronomyEngineeringAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisNanofabrication and Lithography Techniques