Litcius/Paper detail

Accelerating AFM Characterization via Deep‐Learning‐Based Image Super‐Resolution

Young‐Joo Kim, Jaekyung Lim, Do‐Nyun Kim

2021Small35 citationsDOI

Abstract

Atomic force microscopy (AFM) is one of the most popular imaging and characterizing methods applicable to a wide range of nanoscale material systems. However, high-resolution imaging using AFM generally suffers from a low scanning yield due to its method of raster scanning. Here, a systematic method of data acquisition and preparation combined with a deep-learning-based image super-resolution, enabling rapid AFM characterization with accuracy, is proposed. Its application to measuring the geometrical and mechanical properties of structured DNA assemblies reveals that around a tenfold reduction in AFM imaging time can be achieved without significant loss of accuracy. Through a transfer learning strategy, it can be efficiently customized for a specific target sample on demand.

Topics & Concepts

Characterization (materials science)Materials scienceNanoscopic scaleAtomic force microscopyNanotechnologyResolution (logic)Image resolutionRaster graphicsRaster scanComputer scienceArtificial intelligenceIntegrated Circuits and Semiconductor Failure AnalysisForce Microscopy Techniques and ApplicationsAdvanced Electron Microscopy Techniques and Applications