Achieving junction stability in heavily doped epitaxial Si:P
Chung-En Tsai, Yu‐Hsiang Hsu, Iván Santos, Lourdes Pelaz, Jeffrey E. Kowalski, Jhe‐Wei Liou, Wei‐Yen Woon, Chih‐Kung Lee
Topics & Concepts
DopantMaterials scienceDopant ActivationDopingOptoelectronicsEpitaxySiliconAnnealing (glass)Condensed matter physicsNanotechnologyLayer (electronics)Composite materialPhysicsSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignSemiconductor materials and interfaces