Transparent and conductive IZO films: Oxygen and discharge voltage controlled sputtering growth and properties
Pei Lei, Xiaoting Chen, Yue Yan, Jingjing Peng, Changshan Hao, Jianchao Ji, Zhongqi Huo
Topics & Concepts
X-ray photoelectron spectroscopyMaterials scienceSputteringMicrostructureSputter depositionIndiumAnalytical Chemistry (journal)OptoelectronicsThin filmNanotechnologyChemical engineeringComposite materialChemistryEngineeringChromatographyZnO doping and propertiesThin-Film Transistor TechnologiesGas Sensing Nanomaterials and Sensors