Litcius/Paper detail

Transparent and conductive IZO films: Oxygen and discharge voltage controlled sputtering growth and properties

Pei Lei, Xiaoting Chen, Yue Yan, Jingjing Peng, Changshan Hao, Jianchao Ji, Zhongqi Huo

2021Vacuum18 citationsDOI

Topics & Concepts

X-ray photoelectron spectroscopyMaterials scienceSputteringMicrostructureSputter depositionIndiumAnalytical Chemistry (journal)OptoelectronicsThin filmNanotechnologyChemical engineeringComposite materialChemistryEngineeringChromatographyZnO doping and propertiesThin-Film Transistor TechnologiesGas Sensing Nanomaterials and Sensors