Effect of different grinding strategies on subsequent polishing processes of sapphire
Sheng Wang, Sheng Wang, Sheng Wang, Sheng Wang, Guipeng Tie, Feng Shi, Ye Tian, Xiaodong Yang
Topics & Concepts
PolishingMaterials scienceSapphireGrindingFocused ion beamIon beamEtching (microfabrication)Surface roughnessOpticsComposite materialOptoelectronicsLayer (electronics)MetallurgyLaserIonBeam (structure)PhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesDiamond and Carbon-based Materials Research