Density Functional Theory (DFT)-enhanced computational fluid dynamics modeling of substrate movement and chemical deposition process in spatial atomic layer deposition
Dongqing Pan
Topics & Concepts
Atomic layer depositionDeposition (geology)Substrate (aquarium)Computational fluid dynamicsDensity functional theoryVolumetric flow rateLayer (electronics)Materials scienceMolecular dynamicsNanotechnologyChemistryChemical engineeringBiological systemMechanicsComputational chemistryEngineeringPhysicsGeologySedimentOceanographyBiologyPaleontologySemiconductor materials and devicesElectronic and Structural Properties of OxidesAdvancements in Semiconductor Devices and Circuit Design