Precise interferometric surface profiling of silicon wafer using sampling window and wavelength tuning
Jurim Jeon, Sung‐Tae Kim, Yangjin Kim
Topics & Concepts
Fizeau interferometerInterferometryWaferOpticsWavelengthSampling (signal processing)SiliconMaterials scienceComputer scienceElectronic engineeringAlgorithmPhysicsAstronomical interferometerOptoelectronicsEngineeringDetectorOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical Measurements