Structure, mechanical and tribological properties, and oxidation resistance of TaC/a-C:H films deposited by high power impulse magnetron sputtering
Huan Luo, Mohammad Arab Pour Yazdi, Sheng‐Chi Chen, Hui Sun, Fei Gao, Olivier Heintz, Alexis de Monteynard, Frédéric Sanchette, Alain Billard
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceNanocompositeSputter depositionAmorphous solidComposite materialAmorphous carbonTribologySputteringThin filmChemical engineeringNanotechnologyCrystallographyChemistryEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced materials and composites