Integration of microbattery with thin-film electronics for constructing an integrated transparent microsystem based on InGaZnO
Bin Jia, Chao Zhang, Min Liu, Zhen Li, Jian Wang, Li Zhong, Chuanyu Han, Ming Qin, Xiaodong Huang
Abstract
Abstract A full integration of miniaturized transparent energy device (lithium-ion battery), electronic device (thin-film transistor) and sensing device (photodetector) to form a monolithic integrated microsystem greatly enhances the functions of transparent electronics. Here, InGaZnO is explored to prepare the above devices and microsystem due to its multifunctional properties. A transparent lithium-ion battery with InGaZnO as anode (capacity~9.8 μAh cm −2 ) is proposed as the on-chip power source. Then, thin-film transistor with InGaZnO as channel (mobility~23.3 cm 2 V −1 s −1 ) and photodetector with InGaZnO as photosensitive layer (responsivity~0.35 A W −1 ) are also prepared on the substrate for constructing an fully integrated transparent microsystem. Each device displays acceptable performance. Moreover, alternating-current signals can be successfully charged into the lithium-ion battery by using the thin-film transistor as the on-chip rectifier and also the photodetector works well by using the charged battery as the on-chip power, demonstrating collaborative capabilities of each device to achieve systematic functions.