Investigation of nanoscratch anisotropy of C-plane sapphire wafer using friction force microscope
Wangpiao Lin, Jun Shimizu, Libo ZHOU, Teppei Onuki, Hirotaka Ojima
Topics & Concepts
Materials scienceSapphireCrystal twinningDiamondScratchMicroscopeComposite materialAnisotropySlip (aerodynamics)Diamond turningWaferCondensed matter physicsOpticsNanotechnologyPhysicsMicrostructureLaserThermodynamicsMetal and Thin Film MechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials Research