Application of p-type NiO deposited by magnetron reactive sputtering on GaN vertical diodes
Ying Wang, Taofei Pu, Xiaobo Li, Liuan Li, Jin‐Ping Ao
Topics & Concepts
Materials scienceOptoelectronicsSchottky diodeNon-blocking I/OSchottky barrierHeterojunctionDiodeSputter depositionSputteringBreakdown voltageMetal–semiconductor junctionVoltageThin filmElectrical engineeringNanotechnologyChemistryBiochemistryEngineeringCatalysisGaN-based semiconductor devices and materialsGa2O3 and related materialsZnO doping and properties