Cryogenic atom probe tomography and its applications: a review
Ziyang Zhou, Zhengquan Wang, Ranming Niu, Pang-Yu Liu, Chao Huang, Yi‐Hsuan Sun, Xiutong Wang, Hung‐Wei Yen, Julie M. Cairney, Yi‐Sheng Chen
Abstract
Cryogenic atom probe tomography (cryo-APT) is a new microstructure characterization technique with the potential to address challenges across various research fields. In this review, we provide an overview of the development of cryo-APT and the associated instrumentation that transforms conventional APT into cryo-APT. We start by introducing the APT principle and the instrumentation involved in the cryo-APT workflow, emphasizing the key techniques that enable cryo-APT specimen preparation. Furthermore, we shed light on the research made possible by cryo-APT, presenting several recent outcomes to demonstrate its capabilities effectively. Finally, we discuss the limitations of cryo-APT and summarize the potential research areas that can further benefit from this cutting-edge microstructural characterization technique.