Multi-gas detection using Fabry-Perot interferometers on silicon chip
Régis Guertin, Marc-Antoine Bianki, Cédric Lemieux‐Leduc, Yves-Alain Peter
Topics & Concepts
PolydimethylsiloxaneMaterials scienceFabry–Pérot interferometerIsopropyl alcoholSiliconPolyethylene glycolPolymerChipAstronomical interferometerOptoelectronicsPEG ratioOpticsInterferometryNanotechnologyComposite materialWavelengthChemistryOrganic chemistryFinancePhysicsEngineeringElectrical engineeringEconomicsAdvanced Chemical Sensor TechnologiesGas Sensing Nanomaterials and SensorsAnalytical Chemistry and Sensors