Effect of nitrogen flow ratio on the structure and optical properties of AlN film
Xu Jiang, Yanxia Wu, Jiawei Qi, Ying Liu, Yongsheng Wang, Jie Gao, Hongjun Hei, Shengwang Yu
Topics & Concepts
Wurtzite crystal structureMaterials scienceX-ray photoelectron spectroscopyMicrostructureBand gapSputteringNitrideThin filmGrain sizeSputter depositionAnalytical Chemistry (journal)OptoelectronicsComposite materialNanotechnologyMetallurgyChemical engineeringChemistryLayer (electronics)ZincEngineeringChromatographyGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties