Influence of Si surface preparation on CoSi2 formation and agglomeration
Andréa Newman, Andréa Campos, David Saurı́, P. Fornara, M. Grégoire, D. Mangelinck
Topics & Concepts
Materials scienceSilicideNucleationEconomies of agglomerationCobaltWaferNanotechnologyMicroelectronicsDeposition (geology)Substrate (aquarium)Chemical engineeringLayer (electronics)MetallurgyPaleontologyOceanographyGeologyChemistrySedimentBiologyEngineeringOrganic chemistrySemiconductor materials and interfacesSurface and Thin Film PhenomenaSemiconductor materials and devices