Surface-plasmon-coupled optical force sensors based on metal–insulator–metal metamaterials with movable air gap
Taiyu Okatani, Shota Sekiguchi, Kazuhiro Hane, Yoshiaki Kanamori
Abstract
We proposed surface-plasmon-coupled optical force sensors based on metal-insulator-metal (MIM) metamaterials with a movable air gap as an insulator layer. The MIM metamaterial was composed of an air gap sandwiched by a metal nanodot array and a metal diaphragm, the resonant wavelength of which was red-shifted when the air gap was narrowed by applying a normal force. We designed and fabricated a prototype of the proposed sensor and confirmed that the MIM metamaterial could be used as a force sensor with larger sensitivity than a force sensor based on Fabry-Pérot interferometer (FPI).
Topics & Concepts
MetamaterialMaterials scienceAir gap (plumbing)Surface plasmonOptoelectronicsInsulator (electricity)Metal-insulator-metalMetalInterferometryPlasmonSurface plasmon polaritonOptical forceDiaphragm (acoustics)WavelengthOpticsAcousticsComposite materialPhysicsVibrationOptical tweezersQuantum mechanicsMetallurgyVoltageCapacitorAdvanced Fiber Optic SensorsPhotonic and Optical DevicesMechanical and Optical Resonators