Defect reduction in SiC epilayers by different substrate cleaning methods
Daniel Baierhofer, Bernd Thomas, F. Staiger, Barbara Marchetti, Christiane Förster, Tobias Erlbacher
Topics & Concepts
Materials scienceEpitaxyOptoelectronicsSubstrate (aquarium)Chemical vapor depositionYield (engineering)TransistorFabricationSemiconductorPhotoluminescenceNanotechnologyLayer (electronics)Composite materialVoltageQuantum mechanicsAlternative medicinePathologyOceanographyPhysicsGeologyMedicineSilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesSilicon and Solar Cell Technologies