Resonant Magnetometer for Ultralow Magnetic Field Detection by Integrating Magnetoelastic Membrane on Film Bulk Acoustic Resonator
Cong Chen, Libing Bai, Jie Zhang, Lulu Tian, Quan Zhou, Hong Zhou, Dongxiao Li, Xiaojing Mu
Abstract
Here, we report on a composite nanomechanical resonant magnetometer with magnetoelastic thin film integrated on the surface of a film bulk acoustic resonator (FBAR). By exploiting the delta-E effect of magnetoelastic thin film and resonance characteristic in piezoelectric thin film, we theoretically and experimentally demonstrate the capability to realize ultrahigh resonance frequency and excellent magnetic field sensitivity in such composite configuration, thereby greatly improving the limit of detection of weak magnetic field. The proposed FBAR-based resonant magnetometer achieves maximum magnetic sensitivity of 137 kHz/Oe in a proof-of-concept device without structural optimization, corresponding to a noise equivalent power as low as 7 nT/Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> . Further study indicates that by optimizing the thicknesses of the magnetic sensitive layer and piezoelectric layer, an unprecedented sensitivity of 5 GHz/Oe with an exceptional limit of detection of weak magnetic field down to 190 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${f}\text{T}$ </tex-math></inline-formula> /Hz <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">1/2</sup> could be potentially achieved. Our work provides a forward new and exciting route toward ultralow magnetic field detection in civilian and military applications.