Computational fluid dynamics modeling of spatial atomic layer deposition on microgroove substrates
Zoushuang Li, Kun Cao, Xiaobo Li, Rong Chen
Topics & Concepts
Layer (electronics)Deposition (geology)Materials scienceAtomic layer depositionNanotechnologyGeologyPaleontologySedimentSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignAdvanced Data Storage Technologies