A vertical CuO-NWS/MEMS NO2 gas sensor that is produced by sputtering
Ting‐Jen Hsueh, Pao-Sheng Li, Shiyan Fang, Cheng‐Liang Hsu
Topics & Concepts
Microelectromechanical systemsSputteringNanowireMaterials scienceOptoelectronicsNanotechnologyThin filmGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors