Ion yield enhancement at the organic/inorganic interface in SIMS analysis using Ar-GCIB
Vanina Cristaudo, Claude Poleunis, Priya Laha, Pierre Eloy, Tom Hauffman, Herman Terryn, Arnaud Delcorte
Topics & Concepts
SputteringWaferSecondary ion mass spectrometrySiliconAnalytical Chemistry (journal)IonMass spectrometryMaterials sciencePolystyreneIon beamArgonIonizationStatic secondary-ion mass spectrometryPolymerChemistryOptoelectronicsThin filmNanotechnologyOrganic chemistryChromatographyComposite materialIon-surface interactions and analysisDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis