Industrial data space application framework for semiconductor wafer manufacturing system scheduling
Da Chen, Jie Zhang, Lihui Wu, Peng Zhang, Ming Wang
Topics & Concepts
WaferScheduling (production processes)Semiconductor device fabricationManufacturing engineeringIndustrial engineeringSpace (punctuation)Computer scienceEngineeringOperations managementElectrical engineeringOperating systemManufacturing Process and OptimizationDigital Transformation in IndustryScheduling and Optimization Algorithms