Influences of oxygen source and substrate temperature on the unusual growth mechanism of atomic layer deposited magnesium oxide using bis(cyclopentadienyl)magnesium precursor
Bowen Wang, Jin-Woo Choi, Hyoung Gyun Kim, Seung Dam Hyun, Chanyoung Yoo, Seungsoo Kim, Ho‐In Lee, Cheol Seong Hwang
Abstract
This work reveals the unusual MgO ALD growth behaviours as a function of sequence time and substrate temperature, with H 2 O and O 3 as oxygen source, respectively.
Topics & Concepts
MagnesiumMaterials scienceOxygenSubstrate (aquarium)Cyclopentadienyl complexOxideLayer (electronics)Chemical engineeringInorganic chemistryMetallurgyCatalysisNanotechnologyChemistryOrganic chemistryOceanographyGeologyEngineeringSemiconductor materials and devicesMagnesium Oxide Properties and ApplicationsZnO doping and properties