Compositionally engineered amorphous InZnO thin-film transistor with high mobility and stability via atmospheric pressure spatial atomic layer deposition
Chi-Hoon Lee, Kwang Su Yoo, Dong-Gyu Kim, Chang‐Kyun Park, Jin‐Seong Park
Topics & Concepts
Atomic layer depositionMaterials scienceThin-film transistorOptoelectronicsLayer (electronics)Amorphous solidDeposition (geology)TransistorStability (learning theory)Thin filmNanotechnologyChemistryComputer scienceElectrical engineeringEngineeringCrystallographyGeologyVoltageMachine learningSedimentPaleontologyThin-Film Transistor TechnologiesZnO doping and propertiesSilicon Nanostructures and Photoluminescence