Seed-guided high-repetition-rate femtosecond laser oxidation for functional three-dimensional silicon structure fabrication
Jingbo Yin, Minghui Hong
Topics & Concepts
FemtosecondMaterials scienceFabricationSiliconLaserRepetition (rhetorical device)OptoelectronicsOpticsPhysicsMedicineLinguisticsPhilosophyPathologyAlternative medicineLaser Material Processing TechniquesSilicon Nanostructures and PhotoluminescenceNonlinear Optical Materials Studies