Improved silicon oxide/polysilicon passivated contacts for high efficiency solar cells via optimized tunnel layer annealing
Gurleen Kaur, Zheng Xin, Tanmay Dutta, Ranjani Sridharan, Rolf Stangl, Aaron J. Danner
Topics & Concepts
PassivationAnnealing (glass)Materials scienceSiliconForming gasOxideContact resistanceOptoelectronicsAnalytical Chemistry (journal)Composite materialLayer (electronics)ChemistryMetallurgyChromatographySilicon and Solar Cell TechnologiesSemiconductor materials and interfacesSilicon Nanostructures and Photoluminescence