Enhanced high-frequency piezoelectric ultrasonic transducer based on integrated AlN honeycomb structure
Xiaoya Duan, Penglu Li, Chunsheng Wu, Danfeng Cui, Chenyang Xue
Topics & Concepts
PiezoelectricityMaterials scienceUltrasonic sensorHoneycombAcousticsPMUTTransducerHoneycomb structureComposite materialPhysicsAcoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave PropagationUltrasound Imaging and Elastography