Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical & chemical properties and suitability for piezoelectric device integration
M.A. Signore, L. Velardi, Chiara De Pascali, Iren Kuznetsova, Laura Blasi, Francesco Biscaglia, F. Quaranta, Pietro Siciliano, Luca Francioso
Topics & Concepts
PiezoelectricityMaterials scienceThin filmSiliconOptoelectronicsDeposition (geology)NanotechnologyComposite materialSedimentBiologyPaleontologyAcoustic Wave Resonator TechnologiesAdvanced Sensor and Energy Harvesting MaterialsGaN-based semiconductor devices and materials