Plasma-induced atom migration manufacturing of fused silica
Rulin Li, Yaguo Li, Hui Deng
Topics & Concepts
PolishingSmoothingSurface roughnessMaterials sciencePlasmaSurface tensionInductively coupled plasmaAtom (system on chip)Surface (topology)Surface finishAnalytical Chemistry (journal)OpticsChemistryComposite materialGeometryThermodynamicsChromatographyPhysicsComputer scienceMathematicsEmbedded systemComputer visionQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchIon-surface interactions and analysis