Improvement procedure of temperature field for electrothermal microgripper with parallel beam
Jing Zhang, Hao Wu, Hao Shen, Liwei Xue, Wenxia Zhang, Yumo Liu, Fenhao Du, Lei Pan, Haibo Huang, Lin Lin, Liguo Chen
Topics & Concepts
CantileverBeam (structure)ActuatorMaterials scienceTemperature controlSubstrate (aquarium)Field (mathematics)ThermalTemperature measurementMechanical engineeringComposite materialOpticsElectrical engineeringEngineeringThermodynamicsPhysicsGeologyPure mathematicsOceanographyMathematicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsPiezoelectric Actuators and Control