Dynamic humidity response of surface acoustic wave sensors based on zinc oxide nanoparticles sensitive film
Zhangliang Xu, Zhifeng Li
Topics & Concepts
Materials scienceHumidityRelative humiditySurface acoustic waveRayleigh scatteringQuartzNanoparticleThin filmSputter depositionOptoelectronicsAnalytical Chemistry (journal)SputteringNanotechnologyComposite materialAcousticsChemistryOpticsMeteorologyPhysicsChromatographyGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator TechnologiesAdvanced Chemical Sensor Technologies