Influence of the deposition temperature on the optical and electrical properties of TiN film by spectroscopic ellipsometry
Qunchao Ma, Xinwei Shi, Longtao Bi, Jing Li, Qiang Zhou, B.L. Zhu
Topics & Concepts
Materials scienceTinEllipsometryDrude modelInfraredDeposition (geology)Analytical Chemistry (journal)DielectricEmissivityThin filmOpticsOptoelectronicsNanotechnologyChemistryPaleontologyMetallurgyBiologyPhysicsSedimentChromatographyMetal and Thin Film MechanicsCopper Interconnects and ReliabilityZnO doping and properties