Preparation of SiO2@MnO2 composite abrasives and their performance in chemical-mechanical polishing of SiC substrates
Ruixing Yang, Hong Lei, Jianhua Zhang
Topics & Concepts
Materials sciencePolishingComposite numberChemical-mechanical planarizationMetallurgyComposite materialAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis