A Linear Inchworm Piezomotor with a New Configuration: Design Considerations, Fabrication and Characterization

Mohammad Sangchap, Mohammad Tahmasebipour, Younes Tahmasebipour

2020Iranian Journal of Science and Technology Transactions of Mechanical Engineering27 citationsDOI

Topics & Concepts

StiffnessFinite element methodvon Mises yield criterionActuatorMechanical engineeringEngineeringFocus (optics)Computer scienceStructural engineeringElectrical engineeringPhysicsOpticsPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced MEMS and NEMS Technologies