Synergistic crosslinking and cage-structured POSS integrated in polyimides: toward ultra-low dielectric constant and high-resolution photolithography
Xiumei Nie, Song Qiao, Lijuan Xiao, Junquan Wu, Miao Gao, Haoyuan Li, Jianhua Zhang, Daliao Tao
Abstract
Enabling ultra-low dielectric constant and high-resolution photolithography in polyimides via synergistic crosslinking and cage-structured POSS.
Topics & Concepts
PhotolithographyDielectricCageMaterials scienceConstant (computer programming)Resolution (logic)NanotechnologyOptoelectronicsComputer scienceMathematicsProgramming languageCombinatoricsArtificial intelligenceSynthesis and properties of polymersSilicone and Siloxane ChemistrySynthesis and characterization of novel inorganic/organometallic compounds