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Effects of series resistance and interface state on electrical properties of Al/Er2O3/Eu2O3/SiO2/n-Si/Al MOS capacitors

Saleh Abubakar, Ercan Yılmaz

2020Microelectronic Engineering16 citationsDOI

Topics & Concepts

CapacitorEquivalent series resistanceMaterials scienceCapacitanceOptoelectronicsConductanceSemiconductorFabricationFilm capacitorVoltageElectrical engineeringCondensed matter physicsElectrodeChemistryPhysicsMedicineEngineeringPhysical chemistryPathologyAlternative medicineSemiconductor materials and devicesSemiconductor materials and interfacesSilicon Nanostructures and Photoluminescence
Effects of series resistance and interface state on electrical properties of Al/Er2O3/Eu2O3/SiO2/n-Si/Al MOS capacitors | Litcius