Analytical modeling to estimate the sensitivity of MEMS technology-based piezoresistive pressure sensor
Vinod Belwanshi
Topics & Concepts
Piezoresistive effectDeflection (physics)Microelectromechanical systemsMaterials sciencePressure sensorSensitivity (control systems)ElectronicsStress (linguistics)AcousticsOverall pressure ratioStructural engineeringOptoelectronicsMechanical engineeringElectronic engineeringElectrical engineeringOpticsEngineeringPhysicsLinguisticsGas compressorPhilosophyAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsForce Microscopy Techniques and Applications