Architecture and Process Integration Overview of 3D NAND Flash Technologies
Geun Ho Lee, Sungmin Hwang, Junsu Yu, Hyungjin Kim
Abstract
In the past few decades, NAND flash memory has been one of the most successful nonvolatile storage technologies, and it is commonly used in electronic devices because of its high scalability and reliable switching properties. To overcome the scaling limit of planar NAND flash arrays, various three-dimensional (3D) architectures of NAND flash memory and their process integration methods have been investigated in both industry and academia and adopted in commercial mass production. In this paper, 3D NAND flash technologies are reviewed in terms of their architecture and fabrication methods, and the advantages and disadvantages of the architectures are compared.
Topics & Concepts
NAND gateFlash (photography)Computer scienceScalabilityProcess (computing)Computer hardwareEmbedded systemLogic gateOperating systemVisual artsAlgorithmArtAdvanced Data Storage TechnologiesAdvanced Memory and Neural ComputingCellular Automata and Applications