Influence of focus positions on underwater femtosecond laser dicing of silicon wafer
Chengjin Wang, Wang Zhiwen, Wentao Tian, Zheng Hongyu
Topics & Concepts
MachiningMaterials scienceLaserGroove (engineering)WaferFocus (optics)OpticsDepth of focus (tectonics)CavitationShadowgraphFemtosecondWafer dicingLaser ablationSurface roughnessLaser beam machiningOptoelectronicsComposite materialLaser beamsAcousticsMetallurgySubductionPhysicsBiologyPaleontologyTectonicsLaser Material Processing TechniquesOcular and Laser Science ResearchAdvanced Surface Polishing Techniques