Litcius/Paper detail

Fabrication of high precision grating patterns with a compliant nanomanipulator-based femtosecond laser direct writing system

Mengjia Cui, Wei Yang, Yingchun Guan, Zhen Zhang

2022Precision Engineering16 citationsDOI

Topics & Concepts

FemtosecondFabricationGratingMaterials scienceLaserOptoelectronicsOpticsNanotechnologyPhysicsMedicinePathologyAlternative medicineLaser Material Processing TechniquesNonlinear Optical Materials StudiesAdvanced Surface Polishing Techniques