Demonstration of Multiple Internal Resonances in a Microelectromechanical Self-Sustained Oscillator
S. Houri, D. Hatanaka, M. Asano, H. Yamaguchi
Abstract
We investigate the dynamics of a microelectromechanical self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the structure. Self-oscillations are induced in the second flexural mode via a gain-feedback loop; thereafter its frequency is pulled into a commensurate frequency ratio with the other modes, enabling the oscillator to act as a driver or pump for four modes simultaneously.
Topics & Concepts
PhysicsMode (computer interface)Symmetry (geometry)Resonance (particle physics)Vackář oscillatorDynamics (music)Frequency shiftMicroelectromechanical systemsFlexural strengthLongitudinal modeNormal modeSymmetry breakingQuantum mechanicsAtomic physicsQuantum electrodynamicsMechanical and Optical ResonatorsAdvanced MEMS and NEMS TechnologiesNonlocal and gradient elasticity in micro/nano structures