Optimizing the energy efficiency of chiller systems in the semiconductor industry through big data analytics and an empirical study
Kuo-Hao Chang, Chi-Chih Tsai, Chih‐Hung Wang, Chung-Jung Chen, Chih‐Ming Lin
Topics & Concepts
Big dataAnalyticsChillerEfficient energy useData analysisSemiconductor device fabricationManufacturing engineeringEmpirical researchComputer scienceData scienceEngineeringData miningElectrical engineeringPhysicsThermodynamicsWaferEpistemologyPhilosophyDigital Transformation in IndustryIndustrial Vision Systems and Defect DetectionEnergy Efficiency and Management