UNISON decision framework for hybrid optimization of wastewater treatment and recycle for Industry 3.5 and cleaner semiconductor manufacturing
Yun-Siang Lin, Chen–Fu Chien, Dicky Chou
Topics & Concepts
Hydrogen peroxideWastewaterEffluentCleaner productionSemiconductor device fabricationEnvironmental scienceSewage treatmentProcess engineeringWaste managementComputer scienceWaferEnvironmental engineeringEngineeringChemistryMunicipal solid wasteElectrical engineeringOrganic chemistryWater resources management and optimizationWater Quality Monitoring TechnologiesInternet of Things and AI