Hybrid physics-guided data-driven modeling for generalizable geometric accuracy prediction and improvement in two-photon lithography
Sixian Jia, Jieliyue Sun, Andrew Howes, Michelle Dawson, Kimani C. Toussaint, Chenhui Shao
Topics & Concepts
Geometric modelingScale (ratio)Process (computing)Computer scienceAlgorithmMathematicsGeometryPhysicsOperating systemQuantum mechanicsNonlinear Optical Materials StudiesAdvancements in Photolithography TechniquesAdditive Manufacturing Materials and Processes