A framework for detecting unknown defect patterns on wafer bin maps using active learning
Jin-Su Shin, Min-Joo Kim, Dong‐Hee Lee
Topics & Concepts
BinComputer scienceWaferArtificial intelligenceData miningMachine learningPattern recognition (psychology)Materials scienceAlgorithmNanotechnologyIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing Techniques