Structure and properties of Ni1-xTixN thin films processed by reactive magnetron co-sputtering
Bibhu Prasad Sahu, Monali Ray, Rahul Mitra
Topics & Concepts
Materials scienceNanoindentationMicrostructureThin filmSputter depositionResidual stressNanocrystalline materialNanocompositeTinSputteringComposite materialMetallurgyAnalytical Chemistry (journal)NanotechnologyChromatographyChemistryMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsDiamond and Carbon-based Materials Research