Surface reconstruction of sapphire at the atomic scale via chemical-physical tuning of atmospheric plasma
Hui Deng, Yongjie Zhang, Jianwen Liang, Xinquan Zhang
Topics & Concepts
SapphireMaterials sciencePlasmaCrystal (programming language)Etching (microfabrication)Atomic unitsIsotropic etchingSemiconductor device fabricationAbrasiveEnhanced Data Rates for GSM EvolutionSemiconductorDry etchingSurface roughnessOptoelectronicsOpticsNanotechnologyMetallurgyComposite materialLaserComputer sciencePhysicsLayer (electronics)Quantum mechanicsProgramming languageTelecommunicationsWaferDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesSemiconductor materials and devices