Identification of Burgers vectors of threading dislocations in freestanding GaN substrates via multiphoton-excitation photoluminescence mapping
Mayuko Tsukakoshi, Tomoyuki Tanikawa, Takumi Yamada, Masayuki Imanishi, Yusuke Mori, Masahiro Uemukai, Ryuji Katayama
Abstract
Abstract Burgers vectors b of threading dislocations in freestanding GaN substrates were identified through statistical classification using the etch pit and multiphoton-excitation photoluminescence methods. The b = 1 a + 1 c threading mixed dislocations were propagated with large inclination angles more than four degrees from the c -axis to minimize elastic strain energy. The b = 1 c threading edge dislocations had a large contrast difference of more than 0.4 in the photoluminescence image due to their strong nonradiative properties. Based on these characteristics obtained through multiphoton-excitation photoluminescence measurements, major types of dislocations ( b = 1 a , 1 a + 1 c , 1 c ) could statistically be identified.